CHROMIUM ETCHANT CRE-473
Chromium Etchant CRE-473Àº Microelectronics Applications¿¡¼ ChromiumÀÇ ¼±ÅÃÀû ½Ä°¢À» À§ÇÑ Á¦Ç°ÀÔ´Ï´Ù. ƯÈ÷ CRE-473Àº Copper(Cu)¿¡ ´ëÇÏ¿© ÀüÇô AttackÀ» ÇÏÁö ¾Ê±â ¶§¹®¿¡ Cr-CuÀÇ Layer¿¡¼ Cr¸¸À» ¼±Åà ½Ä°¢Çϴµ¥ Ź¿ùÇÑ È¿°ú¸¦ °¡Áö°í ÀÖ½À´Ï´Ù. ¶ÇÇÑ Nickel(Ni), Molybdenum, Gold(Au)¿¡ ´ëÇؼµµ ¶Ù¾î³ Selectivity¸¦ °¡Áö°í ÀÖ½À´Ï´Ù. Negative, Positive Photoresist¸¦ ¸ðµÎ »ç¿ë °¡´ÉÇÕ´Ï´Ù.
COMPATIBILITY :
| Al | Au | Cr | Cu | Ni | Si | Si3N4 | SiO2 | Ti | W | GaAs | Ta/TaN |
CRE-473 | Etch | Ok | Etch | Ok | Slight | Ok | Ok | Ok | Etch | Ok | Etch | Ok |
Etch = significant attack / Slight = Slight attack / Ok = No Attack / Surf ox = Surface Oxidation /
Corrode = Surface Corrosion
Selectivity of about 10:1 for "slight" and selectivity > 1000:1 for "ok" or "no attack"
PROPERTIES :
| CRE-473
| |
Appearance | Water white |
Operating Temperature | 25~40¡É |
Storage | Room Temperature |
Resist compatibility | Nega & Posi |
Tank | Glass or polypropylene |
Etch Rate @ 25¡É | 14 ¡Ê/sec |
Acid base | Hydrochloric Acid |
Rinse | Distilled, Dionized Water |
Shelf Life | 1 Year |
APPLICATION :
• Chromium Etchant CRE-473Àº Copper, Gold, Nickel, Moly bdenum¿Í °°Àº Metal substrates¿¡¼ Chromium¸·À» Á¦°ÅÇϴµ¥ »ç¿ëµÇ´Â Á¦Ç°ÀÔ´Ï´Ù.
• Cr¸·ÀÇ µÎ²²¿¡ µû¶ó¼ Etchant¸¦ 40¡É·Î °¡¿ÇÏ¿© »ç¿ëÇÒ ¼ö ÀÖ½À´Ï´Ù. Etch rateÀº CrÃþÀÇ ¹Ðµµ, °øÁ¤Æ¯¼º¿¡ µû¶ó¼ Â÷ÀÌ°¡ ÀÖÀ» ¼ö ÀÖ½À´Ï´Ù.
• Chromium Etchants sholud be operated in a well ventilated hood.
PACKAGING :
• Available in 3.78L(1 gallon) poly bottles
• Custom packaging is available upon request