CHROME ETCHANT CE-905N
CE-905NÀº ¸ðµç TypeÀÇ Chrome Plates¿¡ »ç¿ëÇÒ ¼ö ÀÖ´Â °æÁ¦ÀûÀÎ Ceric Ammonium Nitrate / Nitric Acid BaseÀÇ Á¦Ç°ÀÔ´Ï´Ù. Etch rateÀº ChromeÃþÀÇ ¹Ðµµ¿Í °øÁ¤Á¶°Ç¿¡ µû¶ó¼ ´Ù¸¦ ¼ö ÀÖ½À´Ï´Ù. Åë»óÀûÀ¸·Î Etch TimeÀº »ó¿Â(25¡É)¿¡¼ 30~60ÃÊ ÀÔ´Ï´Ù. Chrome Etchant CE-905NÀº Sub-micron photolithography applicationsÀÇ »ç¿ë¿¡ ÀûÇÕÇÕ´Ï´Ù.
COMPATIBILITY :
| Al | Au | Cr | Cu | Ni | Si | Si3N4 | SiO2 | Ti | W | GaAs | Ta/TaN |
CE-905N | Etch | Ok | Etch | Etch | Etch | Surf ox | Ok | Ok | Ok | Ok | Etch | Surf ox |
Etch = significant attack / Slight = Slight attack / Ok = No Attack / Surf ox = Surface Oxidation /
Corrode = Surface Corrosion
Selectivity of about 10:1 for "slight" and selectivity > 1000:1 for "ok" or "no attack"
PROPERTIES :
| CE-905N
| |
Appearance | Clear, Orange Liquid |
Operating Temperature | 20~25¡É |
Storage | Room Temperature |
pH (20¡É) | Less than 1.0 |
Tank | Glass or polypropylene |
Etch Rate @ 25¡É | 20~22 ¡Ê/sec |
Acid base | Ceric ammonium nitrate / nitric acid |
Specific Gravity (20¡É) | 1.101 ~ 1.106 |
Filtration | 0.1 micron |
Metals | Meets or exceeds SEMI specifications |
STORGAE AND HANDLING :
• Á÷»ç ±¤¼±À» ÇÇÇÏ¿© »ó¿Â¿¡¼ º¸°üÇÏ¿© ÁֽʽÿÀ. »ç¿ëÇÏÁö ¾ÊÀ» ½Ã¿¡´Â ¸¶°³¸¦ ²À ´Ý¾Æ ÁֽʽÿÀ.
• ÀÌ Á¦Ç°Àº Acid Oxidizing solutionÀÔ´Ï´Ù. Ãë±Þ¿¡ ÁÖÀÇÇÏ¿© ÁֽʽÿÀ.
• ´« ¶Ç´Â ÇǺο¡ Á¢ÃËÇÑ °æ¿ì¿¡´Â ´ë·®ÀÇ ¹°·Î ¾Ä¾î³½ ÈÄ ÀÇ»çÀÇ Áö½Ã¸¦ µû¸£½Ê½Ã¿À.
PACKAGE :
• Available in 3.78L(1 gallon) poly bottles
• Custom packaging is available upon request