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Email : csr@ymstech.co.kr
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Wafer Transfer System
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RAPITRAN II
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Faith Enterperise
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Wafer Transfer Wywte
application
Wafer Transfer Systems
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: RAPITRAN II
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: Wafer Transfer System
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: Faith Enterprise
APPLICATIONS
: Wafer Transfer Systems
OVERVIEW
Faith Enterprises calls upon over 20 years of wafer handling experience to design and build our Rapitran line of 300mm wafer transfer System. The result is a product that will perform beyond your expectations in quality, reliability and capability. So, whether your application requires one of our standard products or a custom designed transfer system. Faith Enterprises has the solution for you.
Standard Features
• Self-Diagnostic Ability
• LCD Operator Interface
• Built-in Notch Aligner
• Membrane control panel
• Wafer Sensors
• Gentle wafer handling
• Cassette and Boat Sensors
• Low cost of ownership
• All Electric Operation
• Simple to operate
• Delrin Wafer Contact Points
• Easy maintenance
• Adjustable Motor Speeds
• All ball bearing motions
• Comprehensive Interlocks for Safety
¡Ü Cleanest Transfer Minimal wafer contact and gentle handling produce a cleaner transfer with less particles added per wafer.
¡Ü Wafer Safety The Faith Enterprises Wafer Transfer System is equipped with sensors that protect the wafers from operator error, such as mispositioned boats or carriers. Interlocks prevent wafers from being dropped. In case of a loss of power, the wafers are held in the current position until power is restored and the automatic reset is initiated.
¡Ü Operator Friendly All stations face the operator to provide a naturally ergonomic loading platform. When the boat, carriers and wafers are in the correct positions, a flashing LED prompts the operator to press the single start button. By checking wafer sensors at all stations, the control chooses the correct transfer.
¡Ü Fast Transfer The Faith Enterprises Wafer Transfer System has an all electric control with extensive speed control adjustments so that the wafers can be moved at high speed and yet ramp down to achieve extremely gentle handling.
¡Ü Versatile Our system is compatible with most Quartz or Silicon Carbde boats as well as plastic and teflon cassettes. The system can transfer conventional back to back loads, or place the wafers in between solid source disks.
¡Ü Optional Features
HEAT SENSOR - A heat sensor can be installed at the quartz boat station to measure the temperature of the wafers to be transferred. Should the temperature exceed an acceptable level, the system becomes inoperable and the operator is warned by an audible alarm and a flashing LED to remove the boat. This option protects the wafers as well as wafer contact parts of the transfer system. WAFER CONTACT MATERIALS - Special materials such as Ultem and Vespel are available for temperature protection. These materials are also available for quartz boat nesting.
¡Ü SEC I and II Interface
A communications interface which comes in the form of an RS-232 Port, as defined by the SECS I Standard is available. It comes prepackaged with all necessary messages for complete control of transfer system by host computer in compliance with the SECS II Standards.