POSITIVE RESIST REMOVER PRR-001
Positive Resist Remover PRR-001Àº Ä£¼ö¼º È¥ÇÕ¹°°ú »ý¹° ºÐÇؼºÀ» °¡Áø ¼ººÐÀÇ È¥ÇÕ ¹°ÁúÀÔ´Ï´Ù. PRR-001Àº ´Ù¾çÇÑ Substrates (¿¹: GaAs, Si, Chrome)»óÀÇ ¸ðµç °øÅëµÈ Positive ÇüÅÂÀÇ ÀÛ¿ëÀ» ÇÏ´Â Photoresists¸¦ Á¦°Å(Dissolve)Çϵµ·Ï ¸¸µé¾î Á³À¸¸ç, ´Ù¾çÇÑ ¸ÞÅ»°ú OxideÇ¥¸é¿¡ ´ëÇÏ¿© ºÎ½Ä¼ºÀ» °¡Áö°í ÀÖÁö ¾Ê½À´Ï´Ù.
PRR-001Àº Phosphates, Chromates, Phenol, Chlorinated Hydrocarbons, Nor Sulfonic AcidsÀ» Æ÷ÇÔÇÏ°í ÀÖÁö ¾ÊÀ¸¸ç, Ưº°ÇÑ Ãë±ÞÁÖÀǸ¦ ÇÊ¿ä·Î ÇÏÁö ¾Ê½À´Ï´Ù. PRR-001Àº »ó¿Â¿¡¼ »ç¿ë°¡´ÉÇϸç, ¾à 2000wafer/gallonÀÇ Bath Life¸¦ °¡Áö°í ÀÖ½À´Ï´Ù. »ç¿ë ¿Âµµ¸¦ Áõ°¡½ÃÅ°¸é PolyamideÀÇ Á¦°Åµµ °¡´ÉÇÕ´Ï´Ù. Àú·ÅÇÑ Running Cost¸¦ °¡Áö°í ÀÖÀ¸¸ç, Shelf Life´Â 1³âÀÔ´Ï´Ù. Á÷»ç±¤¼±À» ÇÇÇÏ¿© ¼´ÃÇÑ °÷¿¡ º¸°ü ÇÏ¿©¾ß ÇÕ´Ï´Ù.
PROPERTIES :
| PRR-001
| |
Appearance | ¹àÀº ³ë¶õ»ö ¾×ü |
Specific Gravity @ 20¡É | 0.99 ¡¾ 0.01 |
pH @ 20¡É | 12.60 ¡¾ 0.05 |
Shelf Life | 1 Year |
±¼Àý·ü (nD 26.6¡É) | 1.4271 ¡¾ 0.0005 |
APPLICATION :
• Bath Make Up : Spray ¶Ç´Â Immersion ¹æ½Ä¿¡ ÀÇÇÑ ¸ðµç ¹ÝµµÃ¼ °øÁ¤¿¡ Àû¿ë.
• Rinse : PRR-001Àº Ä£¼ö¼ºÀÌ ¶Ù¾î³³´Ï´Ù. D.I Water¸¸µå¿À ¼¼Á¤ ÇÔ.
• Bath Life : Bath´Â Á¦°Å ½Ã°£ÀÌ 15ºÐÀ» ³Ñ±â°Å³ª, 2000wafer/gallonÀ» ³Ñ¾î¼± °æ¿ì ±³Ã¼ÇØ¾ß ÇÔ.
• Bath Operation : Immersion¹æ½ÄÀÇ °æ¿ì »ó¿Â¿¡¼ 3~5ºÐÀÇ AgitationÀÌ ÇÊ¿äÇÔ.
¿ë¾×Àº ¿Âµµ°¡ »ó½Â(70~90¡É)µÉ ¼ö ÀÖ½À´Ï´Ù. Immersion Á¦°Å ¹æ½Ä ¶Ç´Â Conveyor ÀåÄ¡¸¦ ÅëÇÑ Spray Á¦°Å ¹æ½ÄÀº Two Tank SystemÀ» »ç¿ëÇϽʽÿÀ.